Nanochannel networks, micro- and nanotube light emitters and waveguides, ultra-compact coils

Quite generally, thin solid films can be released from a substrate surface by selective underetching and form into 3D micro- and nano-objects including various types of 2D confined channels. Here, we show that such released layers self-assemble into complex nanochannel networks, which can be entirely fluid-filled and emptied within fractions of a second.

Furthermore, we demonstrate that /single /material layers roll-up into micro- and nanotubes once they are released from a substrate. In particular, we show that well-positioned all-Si as well as Si/SiO2 tubes can be fabricated, which emit and guide light in the visible spectral range at room temperature. Quantum emitters such as InAs/GaAs quantum dot heterostructures are integrated into the wall of rolled-up microtubes. We study the emission and the waveguiding properties of such quantum dots in a tube. Finally, metal layers are rolled up into microtubes, which opens the way to realize and integrate ultra-compact coils, transformers and capacitors on a single chip.